< img height="1" width="1" style="display:none;" alt="" src="https://px.ads.linkedin.com/collect/?pid=5123436&fmt=gif" /> Asia Photonics Expo (APE) | Shenzhen UBM Herong Exhibition Co., Ltd.-Programme_5


The Agency for Science, Technology and Research (A*STAR) drives mission-oriented research that advances scientific discovery and technological innovation. We play a key role in nurturing and developing talent and leaders for our Research Institutes, the wider research community, and industry. In this visit, you will see technologies developed by A*STAR’s Institute of Microelectronics (IME) and the Institute of Materials Research and Engineering (IMRE). The facility is a Class10 cleanroom with VC-C vibration stability about ~1200m2 in size, housing IME’s advanced tools for semiconductor research and providing services support to the ecosystem. Some of the tools include our immersion lithography tool capable of printing 45nm and above patterns for 300mm wafers, advanced metrology tools like Defect review SEM with capability of 30nm above pattern defects, surface defects, advanced overlay and CD measurement tools. In addition, you will also see devices developed and fabricated by IME and IMRE, such as flat optics and silicon photonics.